江苏海思半导体科技有限公司宣布，一台全自动光刻机于2026年10月12日通过出口欧洲产品的出厂验收1，随后在10月13日正式发运1。这是该公司自2024年以来向境外市场出口的第17台光刻设备1。
此次发运的设备为8英寸全自动掩模对准光刻机，采用350nm/500nm分辨率步进式投影技术1，主要用于硅基Micro LED晶圆的图形化制程1。该公司的光刻产品涵盖MEMS、集成电路、化合物半导体、功率器件、3D封装(TSV)、AR/Micro LED等多个应用领域1。江苏海思已在苏州相城与成都天府新区建立双基地布局1。
Jiangsu Heisi Semiconductor Technology Co., Ltd. announced that a fully automated lithography machine passed factory acceptance inspection for export to Europe on October 12, 2026, marking the company's 17th lithography equipment shipment to overseas markets since 2024.1 On October 13, 2026, another eight-inch fully automated lithography machine completed factory commissioning and was formally dispatched for silicon-based Micro LED wafer patterning processes.1
The exported equipment comprises an eight-inch automated mask alignment lithography machine and a 350nm/500nm resolution step-and-repeat projection lithography machine.1 These systems are designed to serve applications across multiple semiconductor domains, including MEMS, integrated circuits, compound semiconductors, power devices, three-dimensional packaging with through-silicon vias, and augmented reality and Micro LED technologies.1 The company operates dual manufacturing bases located in Suzhou's Xiangcheng District and Chengdu's Tianfu New Area to support its expanding production capacity.1
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